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Click on the system diagram for a larger version.

Upon reaching the surface of the film, some of the light bounces off the surface of the film (Y2O3) and the remainder passes through the film and bounces off the substrate surface (Silicon). The amount of energy reaching the photodetectors will vary sinusoidally with the thickness of the film, as the path difference cycles by l/2, creating alternating troughs and peaks of de- and constructive interference. Ideal behavior can be predicted with Fresnel's equations.

Click on the system photo for a larger version.